Gas Installation References

Cambridge Fluid Systems have designed and installed a number of UHP gas systems for many universities and industrial facilities in the UK, Europe and Turkey. Below is a non exhaustive list of gases we have worked with.

  • SiCl4       Silicon tetrachloride
  • BCl3        Boron Trichloride
  • Cl2          Chlorine
  • CH4         Methane
  • H2           Hydrogen
  • Ar            Argon
  • N2           Nitrogen
  • O2          Oxygen
  • SF6         Sulfur Hexafluoride
  • C4F8       Octafluorocyclobutane
  • CHF3       Fluoroform
  • SiH4        Silane
  • NH3        Ammonia
  • N2O        Nitrous Oxide
  • CF4        Tetrafluoromethane
  • HBr         Hydrogen Bromide
  • HCl         Hydrogen Chloride
  • ASH3      Arsine
  • BF3         Boron trifluoride
  • CO2        Carbon dioxide
  • CO          Carbon monoxide