Gas Installation References

Cambridge Fluid Systems have designed and installed a number of UHP gas systems for many universities and industrial facilities in the UK, Europe and Turkey.

Cambridge University

Bath University

Manchester University


Glasgow University (JWNC)

Herriot Watt

Istanbut Technical University


Sabanci University

Below is a non exhaustive list of gases we have worked with.

  • SiCl4       Silicon tetrachloride
  • BCl3        Boron Trichloride
  • Cl2          Chlorine
  • CH4         Methane
  • H2           Hydrogen
  • Ar            Argon
  • N2           Nitrogen
  • O2          Oxygen
  • SF6         Sulphur Hexafluoride
  • C4F8       Octafluorocyclobutane
  • CHF3       Fluoroform
  • SiH4        Silane
  • NH3        Ammonia
  • N2O        Nitrous Oxide
  • CF4        Tetrafluoromethane
  • HBr         Hydrogen Bromide
  • HCl         Hydrogen Chloride
  • ASH3      Arsine
  • BF3         Boron trifluoride
  • CO2        Carbon dioxide
  • CO          Carbon monoxide